INTERNATIONAL ROUND-ROBIN EXPERIMENT FOR SIMS-QUANTIFICATION

Abstract

Cross Calibration is an attempt to make relative sensitivity factors (RSFs) transferable between SIMS instruments and also usable by the same instrument at different times. The method relies on adjustment of carefully selected operating conditions and instrument tuning parameters, so that closely corresponding raw peak height ratios are obtained from the same sample by different instruments. The transferability of RSFs can be caracterised by the factors 1.68 and 2.40 for metallic glass and semiconductor matrices, respectively. Quantitative analysis of "unknown" samples resulted in an over al error factor of 1.31.